CVD Machine

Product Description

• Parameter

  Diamond Making Machine

  CVD Diamond Growth System

  一、Equipment name and quantity

  Equipment name：CVD Diamond Growth System

• 二、Main specifications and technical indicators of the equipment

  1.Overview

  1.1. Dimensions : 1620*860*2500mm ( Depending on the latest appearance )

  1.2. Vacuum chamber: Coupled cavity dimensions:≈φ320mm×180mm, it is made of aluminum alloy and the plasma chamber is sealed by a quartz tube.

  1.3. The main inlet and outlet of the equipment adopt 25mm outer diameter pagoda connector, the cooling water pipes are all made of PU pipes, and the water inlet is equipped with a water pressure sensor and a water inlet filter device. Except for the air-cooled cavity, other important parts that need cooling are all cooled by a separate water supply, there are color distinction and corresponding identification on the inlet and outlet hoses.

  1.4.The air filter, the process gas pipeline, and the flow meter are integrated on the gas distribution plate. The process gas pipeline adopts 1/4 inch EP grade SUS 316L stainless steel pipe. The compressed air pipeline adopts PU pipeline.

  1.5.Observation window: There are 4 observation ports for temperature measurement and observation of diamond growth.

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  2.Vacuum system

  2.1 Vacuum obtainment: Using Leybold D16C three-phase rotary vane pump

  2.2 Vacuum index

  2.2.1 Ultimate vacuum of growth chamber : ≤5×10-4Pa .( After the chamber is assembled, the manufacturer obtains the parameters through the molecular pump before the final assembly)

  2.2.2 Pump-down time: 3.0×10-3Pa≤15min. ( After the chamber is assembled, the manufacturer obtains the parameters through the molecular pump before the final assembly)

  2.3 Vacuum measurement

  Capacitance gauge ( Measuring range: 0.1-1000 Pa )

  3.Sample stage

  3.1 Sample stage diameter: Φ 50 mm ( It can grow 12 pieces of 8*8 single crystal at the same time, up to 21 pieces of 7*7 single crystal can be grown at same time)

  7*7 Molybdenum stage for diamond single crystal growth : 2 pieces

  8*8 Molybdenum stage for diamond single crystal growth : 2 pieces

  4.Microwave power supply : Germany Muegge microwave source, power: 0.6-6 kw

  5.Gas system : it contains H2 (1000sccm), CH4 (50sccm), O2 (10sccm), N2(10sccm) four type gas (which can be customized according to customers)

  Process flow rate : H2（600sccm） 、CH4(30sccm)、O2(2sccm)、N2（1sccm）

  6.Temperature measurement : Infrared thermometer

  7.Power supply : Uninterrupted power supply which greater than 10kw / voltage 380-400v

  Equipment energy consumption: ≈8.5kw

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• 三．Acceptance

  1. Diamond single crystal growth

  2.Technical index: Simultaneous growth of 16 pieces 7*7*0.3 mm single crystals (provided by the seller)

  3.Growth: The gem grade single crystal growth rate is 5-10um/h, and the one time growth rate is 1mm , and the color is better than H color